Prof Souri Banerjee
vidwan id: 228832
Senior Professor, Department of Physics
Birla Institute of Technology and Science
Expertise
- Applied Physics
Publications
Publications
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Scopus
h-index
12
CrossRef
Citations
427
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10
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Bio
Extensive use of Clean Room ( Class-100 to 10,000), Photolithography and Mask making, Electron Beam Lithography (Minimum beam spot size of 10nm) equipped with mini-CAD for patterning and transfer of about 30 nm gap pattern, CVD, Etching, Oxidation Technique, Electron Beam Evaporator for very thin metal deposition, Field Emission type SEM to obtain image of narrow quantum well or narrow patterns, Thin film and nanocrystal deposition using different CVD techniques, Sputtering etc. Device Fabr
Personal Details
- Male
- Senior Professor , Birla Institute of Technology and Science
- Academic City - Dubai - Dubai - United Arab Emirates
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Co-Authors (12)
Birla Institute of Technology and Science
Indian Institute of Technology Jammu
National Institute of Technology Rourkela
Jaypee Institute of Information Technology, Noida
Dr VVSN Prabhakar Rao Budhiraju
Birla Institute of Technology and Science
Birla Institute of Technology and Science
Dr Nagendra Prasad Devarapalli
Vallurupalli Nageswara Rao Vignana Jyothi Institute of Engineering and Technology
Birla Institute of Technology and Science
Calcutta University
Birla Institute of Technology and Science
Birla Institute of Technology and Science
Birla Institute of Technology and Science
Scholarly Work
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Investigation of the properties of plasma deposited silicon nitride thin films
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